Hydrogen-induced degradation in epitaxial and polycrystalline (Ba,Sr)TiO 3 thin films

Applied Physics Letters

Volumn 84, Issue 19, 2004, Pages 3825-3827

  Lee, Jang Sik ^a   Li, Y ^a   Lin, Y ^a   Lee, Sang Yeol ^a,b   Jia, Q X ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COLUMNAR STRUCTURES; DIELECTRIC RESPONSE; HYDROGEN-INDUCED DEGRADATION; LATTICE DIFFUSIVITY;

ANNEALING; BARIUM TITANATE; DEGRADATION; DEPOSITION; DIELECTRIC PROPERTIES; ELECTRODES; EPITAXIAL GROWTH; GRAIN BOUNDARIES; HYDROGEN; INTEGRATED CIRCUITS; PASSIVATION; PLATINUM; POLYCRYSTALLINE MATERIALS; STRONTIUM COMPOUNDS;

THIN FILMS;

EID: 2942608044     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1745105     Document Type: Article

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