Improvement of anodic bond quality with the assistance of sputtered amorphous film

Sensors and Actuators, A: Physical

Volumn 113, Issue 2, 2004, Pages 218-225

  Wei, J ^a   Wong, C K ^a   Lee, L C ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Amorphous film; Anodic bonding; Integrity; Low temperature; Strength

Indexed keywords

ANODIC OXIDATION; CHEMICAL BONDS; HYDROGEN; INTERFACES (MATERIALS); LOW TEMPERATURE EFFECTS; MASS SPECTROMETRY; SILICON WAFERS; SPUTTERING;

ANODIC BONDING; INTEGRITY; LOW TEMPERATURE; STRENGTH;

AMORPHOUS FILMS;

EID: 2942606067     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.001     Document Type: Article

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