In situ investigation of ion drift processes in glass during anodic bonding

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 191-198

  Schmidt, B ^a   Nitzsche, P ^a   Lange, K ^a,c   Grigull, S ^a   Kreissig, U ^a   Thomas, B ^b   Herzog, K ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b TU BERGAKADEMIE FREIBERG   (Germany)

^c UNIVERSITY OF BERN   (Switzerland)

Author keywords

Anodic bonding; Ion drift processes in glasses; Packaging

Indexed keywords

ELECTRONICS PACKAGING; GLASS; ION BEAMS;

ANODIC BONDING; ION DRIFT;

ANODIC POLARIZATION;

EID: 0032074033     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0924-4247(97)01768-8     Document Type: Article

References (20)

1. G. Wallis, D.I. Pomerantz, Field assisted glass-metal sealing, J. Appl. Phys. 40 (1969) 3946.
2. H. Baumann, S. Mack, H. Münzel, Bonding of structured wafers, in: C.E. Hunt, H. Baumgart, S.S. Iyer, T. Abe, U. Gösele (Eds.), Semiconductor Wafer Bonding: Physics and Application III, PV 95-7, The Electrochemical Society Proceedings Series, Pennington, NJ, 1995, p. 471.
3. D.E. Carlson, K.W. Hang, G.F. Stockdale, Electrode 'polarization' in alkali-containing glasses, J. Am. Ceram. Soc. 55 (1972) 337.
4. Y. Kanda, K. Matsuda, C. Murayama, J. Sugaya, The mechanism of field-assisted silicon-glass bonding, Sensors and Actuators A21-A23 (1990) 939.
5. K.B. Albaugh, D.R. Rasmussen, Rate processes during anodic bonding, J. Am. Ceram. Soc. 75 (1992) 2644.
6. G. Wallis, Direct current polarization during field assisted glass-metal sealing, J. Am. Ceram. Soc. 53 (1970) 563.
7. D.E. Carlson, Ion depletion of glasses at a blocking anode: I. Theory and experimental results for alkali silicate glass, J. Am. Ceram. Soc. 57 (1974) 291.
8. K.B. Albaugh, Electrode phenomena during anodic bonding of silicon to sodium boro-silicate glass, J. Electrochem. Soc. 138 (1991) 3089.
9. S. Grigull, R. Behrisch, U. Kreissig, M. Harz, Simultaneous analysis of low-Z impurities in the near-surface region of solid materials by heavy ion elestic recoil detection (HIERD), Fresenius' Z. Anal. Chem. 353 (1995) 578.
10. S. Grigull, U. Kreissig, H. Huber, W. Assmann, Element-dependent ERDA probing depths using different detection systems, Nucl. Instrum. Methods B, submitted for publication.
11. K. Lange, S. Grigull, M. Harz, U. Kreissig, B. Schmidt, Ion drift behaviour in borosilicate glasses during anodic bonding to silicon or metals, in: C.E. Hunt, H. Baumgart, S.S. Iyer, T. Abe, U. Gösele (Eds.), Semiconductor Wafer Bonding: Physics and Application III, PV 95-7, The Electrochemical Society Proceedings Series, Pennington, NJ, 1995, p. 371.
12. H. Scholz, Glas - Natur, Struktur und Eigenschaften, Springer, Berlin, 1988.
13. C.G. Wilson, A.C. Carter, The self-diffusion of sodium ions in a borosilicate glass and a soda-lime glass, Phys. Chem. Glasses 5 (1964) 111.
14. D.E. Carlson, K.W. Hang, G.F. Stockdale, Ion depletion of glass at a blocking anode: II. Properties of ion depleted glasses, J. Am. Ceram. Soc. 57 (1974) 295.
15. A. Cozma, B. Puers, Characterization of the electrostatic bonding of silicon and PYREX glass, J. Micromech. Microeng. 5 (1995) 98.
16. M. Harz, Der Einfluß der Elektrodengestaltung auf die Geschwindigkeit und die Qualität des anodischen Bondens, Sensor Magazine 1 (1995) 24.
17. K. Hauffe, Oxidation von Metallen und Metallegierungen, Springer, Berlin, 1956.
18. 2, J. Non-Crystalline Solids 27 (1978) 363.
19. M.E. Milberg, J.G. O'Keffe, R.A. Verhelst, H.O. Hooper, Boron coordination in sodium borosilicate glasses, Phys. Chem. Glasses 13 (1972) 79.
20. D.E. Carlson, Anodic proton injection in glasses, J. Am. Ceram. Soc. 57 (1974) 461.