Low temperature deposition of crystalline chromium phosphide films using dual-source atmospheric pressure chemical vapour deposition

Applied Surface Science

Volumn 233, Issue 1-4, 2004, Pages 24-28

  Blackman, Christopher S ^a   Carmalt, Claire J ^a   Manning, Troy D ^a   Parkin, Ivan P ^a   Apostolico, Leonardo ^b   Molloy, Kieran C ^b  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b University of Bath   (United Kingdom)

Author keywords

Chromium phosphide; CVD; Hexacarbonyl; Thin film

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; CHROMIUM COMPOUNDS; CRYSTALLINE MATERIALS; LOW TEMPERATURE EFFECTS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHROMIUM PHOSPHIDE; HEXACARBONYL; LOW TEMPERATURE DEPOSITION; PYROPHORIC GAS;

SURFACE CHEMISTRY;

EID: 2942590855     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.04.010     Document Type: Article

References (15)

1. Ripley R.L. J. Less-Common Met. 4:1962;496.
2. I. Teruhiko, W. Junichi, M. Tomotaka, JP Patent No. 9,232,579 (5 September 1997).
3. Motojima S., Higashi T. J. Cryst. Growth. 71:1985;639.
4. Watson I.M., Connor J.A., Whyman R. Thin Solid Films. 196:1991;L21.
5. Watson I.M., Connor J.A., Whyman R. Thin Solid Films. 201:1991;337.
6. Blackman C.S., Carmalt C.J., O'Neill S.A., Parkin I.P., Apostolico L., Molloy K.C. Chem. Mater. 14:2002;3167.
7. Blackman C.S., Carmalt C.J., O'Neill S.A., Parkin I.P., Apostolico L., Molloy K.C. J. Mater. Chem. 13:2003;1930.
8. Blackman C.S., Carmalt C.J., Manning T.D., O'Neill S.A., Parking I.P., Apostolico L., Molloy K.C. Chem. Vapor Deposit. 9:2003;10.
9. C.S. Blackman, C.J. Carmalt, I.P. Parkin, Unpublished results.
10. Price L.S., Parkin I.P., Hardy A.M.E., Clark R.J.H., Hibbert T.G., Molloy K.C. Chem. Mater. 11:1999;1792.
11. Watson I.M., Connor J.A., Whyman R. Polyhedron. 8:1989;1794.
12. Rundqvist S. Acta Chem. Scand. 16:1962;287.
13. Myers C.E., Franzen H.F., Anderegg J.W. Inorg. Chem. 24:1985;1822.
14. D. Briggs, M.P. Seah (Eds.), Practical Surface Analysis, vol. 1, Auger and X-ray Photoelectron Spectroscopy, vol. 1, Wiley, Chichester, 1990.
15. Blackman C., Carmalt C.J., Parkin I.P., O'Neill S.A., Apostolico L., Molloy K.C., Rushworth S. Chem. Mater. 14:2002;3167.