Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine

Chemical Vapor Deposition

Volumn 9, Issue 1, 2003, Pages 10-13

  Blackman, Christopher S ^a   Carmalt, Claire J ^a   Manning, Troy D ^a   O'Neill, Shane A ^a   Parkin, Ivan P ^a   Apostolico, Leonardo ^b   Molloy, Kieran C ^b  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b University of Bath Claverton Down   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; COMPOSITION; CORROSION RESISTANCE; CRYSTALLINE MATERIALS; GLASS; IONIZATION; MOLYBDENUM COMPOUNDS; PHOSPHORUS;

CYCLOHEXYLPHOSPHINE; SURFACE OXYGEN IONIZATION; VISIBLE SPECTRUM;

AMORPHOUS FILMS;

EID: 0037642221     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200290000     Document Type: Article

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