Sputtering of indium using polyatomic projectiles

Applied Surface Science

Volumn 231-232, Issue , 2004, Pages 191-195

  Samartsev, A V ^a   Wucher, A ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Cluster bombardment; Cluster emission; Ionization probability; Polyatomic projectiles; Sputtering

Indexed keywords

ION BOMBARDMENT; IONIZATION; LASER BEAMS; MASS SPECTROMETERS; POLYCRYSTALLINE MATERIALS; PROBABILITY; PROJECTILES; SPUTTERING;

CLUSTER BOMBARDMENT; CLUSTER EMISSION; IONIZATION PROBABILITY; POLYATOMIC PROJECTILES;

INDIUM;

EID: 2942590563     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.03.115     Document Type: Conference Paper

References (14)

1. Stapel D., Brox O., Benninghoven A. Appl. Surf. Sci. 140:1998;156.
2. Hagenhoff B., Benninghoven A., Siegmund H.U., Holtkamp D. Thin Solid Films. 210-211:1992;601.
3. Le Beyec Y. Int. J. Mass Spectrom. Ion Proc. 174:1998;101.
4. Appelhans A.D., Delmore J. Anal. Chem. 61:1989;1087.
5. Kötter F., Benninghoven A. Appl. Surf. Sci. 133:1998;47.
6. Gillen G., Walker M., Thompson P., Bennett J. J. Vac. Sci. Technol. B. 18(1):2000;503.
7. Gillen G., Roberson S. Rapid Commun. Mass Spectrom. 12:1998;1303-1312.
8. Wucher A., Wahl M., Oechsner H. Nucl. Instrum. Meth. B. 82:1993;337.
9. M.L. Yu, in: K. Wittmaack, R. Behrisch (Eds.), Sputtering by Particle Bombardment III, Springer, Berlin, 1991, p. 91.
10. Sroubek Z. Spectrochim. Acta B. 44:1989;317.
11. Sroubek Z., Lorincik J. Surf. Rev. Lett. 6:1999;257.
12. Belykh S.F., Habets B., Rasulev U.Kh., Samartsev A.V., Stoev L.V. Nucl. Instrum. Meth. B. 164-165:2000;809.
13. Belykh S.F., Wojciechowski I.A., Palitsin V.V., Zinoviev A.V., Adriaens A., Adams F. Surf. Sci. 488:2001;141.
14. Belykh S.F., Palitsin V.V., Adriaens A., Adams F. Phys. Rev. B. 66:2002;195309.