Formation of an MN-type cubic nitride phase in reactively sputtered stainless steel-nitrogen films

Journal of Crystal Growth

Volumn 267, Issue 1-2, 2004, Pages 385-393

  Kappaganthu, S R ^a   Sun, Y ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

A1. Crystal structure; A3. Thin film; B1. Nitride; B1. Nitrogen; B1. Stainless steel

Indexed keywords

COMPOSITION; CRYSTAL STRUCTURE; EVAPORATION; IMPEDANCE MATCHING (ACOUSTIC); LATTICE CONSTANTS; MAGNETRON SPUTTERING; NITROGEN; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; SUPERSATURATION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ELECTRON PROBE MICROANALYSIS (EPMA); SELECTED AREA DIFFRACTION (SAD); SUBSTRATE TEMPERATURE; THERMAL EVAPORATION;

NITRIDES;

EID: 2942578048     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.03.066     Document Type: Article

References (22)

1. Eymery J.P., Laplanche G. J. Magn. Magn. Mater. 93:1991;179.
2. Eymery J.P., Laplanche G., Cahoreau M., Denanot M.F. Thin Solid Films. 217:1992;1.
3. Boubeker B., Goudeau Ph., Serrari A., Eymery J.P. Nucl. Instrum. Methods B. 155:1999;289.
4. Inoue Shozo, Saeki Tishiaki, Uchida Hitoshi, Koterazawa Keiji, Iwasa Mikio Vacuum. 66:2002;257.
5. Koskinen J., Torri P., Hirvonen J-P., Mahiout A., Stanishevsky A. Surf. Coat. Technol. 80:1996;57.
6. Eymery J.P., Merakeb N., Goudeau Ph., Fnidiki A., Bouzabata B. J. Magn. Magn. Mater. 256:2003;227.
7. Bourjot A., Foos M., Frantz C. Surf. Coat. Technol. 43/44:1990;533.
8. Darbeida A., Saker A., Billard A., von Stebut J. Surf. Coat. Technol. 60:1993;434.
9. Shedden B.A., Kaul F.N., Samandi M., Window B. Surf. Coat. Technol. 97:1997;102.
10. Dahm K.L., Dearnley P.A. Surf. Eng. 12:1996;61.
11. Saker A., Leroy Ch., Michel H., Frantz C. Mater. Sci. Eng. A. 140:1991;702.
12. Matthews A., Leyland A., Dorn B., Stevenson P.R., Bin-Sudin M., Rebholz C., Voevodin A., Schneider J. J. Van. Sci. Technol. A. 13:1995;1202.
13. Von Stebut J., Darbeida A., Saker A., Billard A., Rezakhanlou R. Surf. Coat. Technol. 57:1993;31.
14. Normand B., Pierre A., Pagetti J. Corros. Sci. 37:1995;1537.
15. Sun Y., Li X.Y., Bell T. J. Mater. Sci. 34:1999;4793.
16. Shankar P., Sundararaman D., Ranganathan S. J. Nucl Mater. 254:1998;1.
17. Callister W.D. Materials Science and Engineering. 6th Edition:2003;Wiley, USA.
18. Rissanen L., Neubauer M., Lieb K.P., Schaaf P. J. Alloy Compds. 274:1998;74.
19. Rissanen L., Schaaf P., Neubauer M., Lieb K.P., Keinonen J., Sajavaara T. Appl. Surf. Sci. 1380139:1999;261.
20. Shimizu H., Shirai M., Suzuki N. Physica B. 237-238:1997;546.
21. Gupta M., Gupta A., Bhattacharya P., Misra P., Kukreja L.M. J. Alloys Compds. 326:2001;265.
22. Jack K.H. J. Appl. Phys. 76:1994;6632.