The role of energetic neutrals in reactive magnetron sputtering of nitrogen-doped austenitic stainless steel coatings

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 102-108

  Shedden, B A ^a,c   Kaul, F N ^a   Samandi, M ^a   Window, B ^b  

^a UNIVERSITY OF WOLLONGONG   (Australia)

^b CSIRO   (Australia)

^c BHP BILLITON   (Australia)

Author keywords

Energetic neutrals; Magnetron sputtering; Nitrogen additions; Stainless steel coatings

Indexed keywords

ARGON; AUSTENITE; COMPUTER SIMULATION; COMPUTER SOFTWARE; DISSOLUTION; DOPING (ADDITIVES); ION BOMBARDMENT; LATTICE CONSTANTS; MAGNETRON SPUTTERING; NITROGEN; RESIDUAL STRESSES;

ENERGETIC NEUTRALS; REACTIVE MAGNETRON SPUTTERING; SOFTWARE PACKAGE TRIM;

STAINLESS STEEL;

EID: 0031368866     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00138-2     Document Type: Article

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