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Volumn 66, Issue 3-4, 2002, Pages 257-261

Effects of ion flux on the properties of dc magnetron-sputtered stainless steel films

(5) Inoue, Shozo a Saeki, Toshiaki a Uchida, Hitoshi a Koterazawa, Keiji a Iwasa, Mikio b

a UNIVERSITY OF HYOGO (Japan)

b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Corrosion resistance; Dc unbalanced magnetron sputtering; Hardness; Ion flux; Stainless steel films; Structure

Indexed keywords

AUSTENITE; CORROSION RESISTANCE; HARDNESS; IONS; MAGNETIC FIELDS; MAGNETIC FLUX; MAGNETRON SPUTTERING; STAINLESS STEEL; SUBSTRATES;

ION FLUX;

PROTECTIVE COATINGS;

EID: 0037136084 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/S0042-207X(02)00151-3 Document Type: Article

Times cited : (20)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.