Excimer laser crystallized phosphorous-doped polycrystalline silicon

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 143-146

  Saleh, R ^a   Nickel, N H ^b  

^a UNIVERSITY OF INDONESIA   (Indonesia)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); COSTS; CRYSTALLIZATION; DECOMPOSITION; DOPING (ADDITIVES); HYDROGEN BONDS; PHOSPHORS; POLYSILICON; QUARTZ; VOLUME FRACTION;

FANO EFFECTS; GAS PHASE DOPING; LASER CRYSTALLIZATION;

POLYCRYSTALLINE MATERIALS;

EID: 2942538114     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.02.040     Document Type: Conference Paper

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