Electrostatic Membrane Deformable Mirror characterization and applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5894, Issue , 2005, Pages 1-15

  Bush, Keith ^a   Marrs, Anthony ^a   Schoen, Michael ^a  

^a AgilOptics Inc   (United States)

Author keywords

Deformable mirror; Electrostatic; Membrane; MEMS applications; Wavefront control

Indexed keywords

ACTUATOR PAD ARRAY; MEMBRANE DEFORMABLE MIRRORS (MDM); MEMS APPLICATIONS; WAVEFRONT CONTROL;

ABERRATIONS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; OPTICAL SYSTEMS; WAVEFRONTS;

MIRRORS;

EID: 29344463260     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.621113     Document Type: Conference Paper

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