A method for reducing tool wear in a polishing process

International Journal of Machine Tools and Manufacture

Volumn 46, Issue 3-4, 2006, Pages 413-423

  Tu Chieh, Hung ^a   Yaw Terng, Su ^b  

^a DEPARTMENT OF PHYSICS   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Adhesive strength; Particle size; Tool wear

Indexed keywords

ADHESIVE STRENGTH; PARTICLE SIZE; PARTICLE-TOOL INTERFACE; TOOL WEAR;

ADHESIVES; COMPUTER SIMULATION; INTERFACES (MATERIALS); PARTICLE SIZE ANALYSIS; POLISHING; WEAR OF MATERIALS;

TOOLS;

EID: 29244470560     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2005.05.007     Document Type: Article

References (23)

1. Y.T. Su, T.C. Hung, and C.C. Horng An experimental study on tool wear of hydrodynamic polishing process Wear 246 2000 117 129
2. Y.T. Su, C.C. Horng, S.Y. Wang, and S.H. Jang Ultra-precision machining by the hydrodynamic polishing process Int. J. Mach. Manufact. 36 2 1996 275 291
3. Y.T. Su, C.C. Horng, J.Y. Sheen, and J.S. Hsiau A process planning strategy for removing non-axially symmetric form error by hydrodynamic polishing process Int. J. Mach. Manufact. 39 11 1999 187 207
4. Y.T. Su, and J.Y. Sheen A process planning strategy for removing arbitrary and axially symmetric profile by polishing process Int. J. Mach. Manufact. 39 11 1999 187 207
5. I. Ali, and S.R. Roy Pad conditioning in inter layer dielectric CMP Solid State Technol. 40 1997 185 186
6. Y.T. Su, T.C. Hung, C.C. Ou, A preliminary analysis on tool wear rate of polishing process: adhesion effects, Wear, accepted for publication.
7. R.I. Trezona, D.N. Allsopp, and I.M. Hutchings Transition between two-body and three-body abrasive wear: influence of test conditions in the microscale abrasive wear test Wear 225-229 1999 205 214
8. Y. Mori, K. Ymauchi, and K. Endo Elastic emission machining Precis. Eng. 9 3 1987 123 128
9. Y. Mori, K. Yamauchi, and K. Endo Mechanism of atomic removal in elastic emission machining Int. J. Jpn. Soc. Precis. Eng. 110 1 1988 24 28
10. Y. Mori, and K. Endo Interaction force between solids surfaces (part I): an atomistic estimation of interaction force Jpn. J. Trib. 37 5 1992 525 537
11. K. Kendall Rolling friction and adhesion between smooth solids Wear 33 1975 351 358
12. K.L. Johnson, K. Kendall, and A.D. Roberts Surface energy and the contact of elastic solids Proc. R. Soc. Lond. A 324 1971 303 313
13. K. Kendall Adhesion: molecules and mechanics Science 263 1994 1720 1725
14. L.L. Henry Energy methods in applied mechanics 1964 Wiley New York
15. L.J. Hunter Zeta potential in colloid science: principles and applications 1981 Academic press London
16. W. Vogel Chemistry of glass 1985 The American Ceramic Society USA
17. T.S. Izumitani Optical Glass 1986 American Institute of Physics New York
18. L. Hencch, and D. Ulrich Science of Ceramic Chemical Processing 1986 Wiley New York
19. L.M. Cook Chemical processes in glass polishing J. Non-Cryst. Solids 120 1990 152 171
20. T.B. Osborne The Proteins of Wheat Kernel, Publication 84 1907 Carnegie Institute of Washington Washington, DC
21. E.L. Sliwinski, P. Kolster, A. Prins, and T. van Vliet On the relationship between gluten protein composition of wheat flours and large-deformation properties of their doudhs J. Cereal Sci. 39 2004 247 264
22. J.A. Brydson Rubbery Materials and their Compounds 1988 Elsevier London
23. R.L. Aghan, and L.E. Samuels Mechanisms of abrasive polishing Wear 16 1970 293 301