Preparation and properties of sub-micron thick and free-standing diamond membranes

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 721-725

  Michaelson, Sh ^a   Akhvlediani, R ^a   Hoffman, A ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

CVD; Diamond; Etching; Free standing; Sub micron

Indexed keywords

ABRASION; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; ETCHING; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

OPTICAL TRANSPARENCY;

DIAMONDS;

DIAMOND; MECHANICAL PROPERTY; MEMBRANE; THICKNESS; VAPOR DEPOSITION;

EID: 0036508294     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00658-6     Document Type: Article

References (6)