Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant

Diamond and Related Materials

Volumn 15, Issue 1, 2006, Pages 49-54

  Glaser, A ^a   Rosiwal, S M ^a   Singer, R F ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Composites; Hot filament cvd; Silicon carbide; Vapor growth

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITE MATERIALS; DIAMONDS; POROUS MATERIALS; SILICON CARBIDE; SUBSTRATES; VAPORS;

CHEMICAL VAPOR INFILTRATION (CVI); HOT-FILAMENT CVD; HOT-FILAMENT PLANT; VAPOR GROWTH;

INFILTRATION;

EID: 29144459274     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.07.010     Document Type: Article

References (22)

1. K. Yoshida, and H. Morigami Microelectron. Reliab. 44 2 2004 303
2. O.T. Inal, and Q. Sun Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 41 2 1996 261
3. A. Glaser, S.M. Rosiwal, B. Freels, and R.F. Singer Diamond Relat. Mater. 13 2004 834
4. K.J. Huettinger Chem. Vap. Depos. 4 4 1998 151
5. S.C. Eaton, M.K. Sunkara, M. Ueno, and K. Walsh Diamond Relat. Mater. 10 2001 2212
6. O. Sanchez, M.M. Garcia, L. Vazquez, and C. Gomez-Aleixandre Vacuum 45 10-11 1994 1015
7. J.M. Albella, C. Gomez-Aleixandre, O. Sanchez-Garrido, L. Vazquez, and J.M. Martinez-Duart Surf. Coat. Technol. 70 1995 163
8. W.A. Weimer, F.M. Cerio, and C.E. Johnson J. Mater. Res. 6 10 1991 2134
9. P. Greil, T. Lifka, and A. Kaindl J. Eur. Ceram. Soc. 18 1998 1961
10. H. Sieber, C. Hoffmann, A. Kaindl, and P. Greil Adv. Eng. Mater. 2 2000 105
11. F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and T. Chauveau Diamond Relat. Mater. 5 1996 338
12. D.G. Goodwin J. Appl. Phys. 74 1993 6888
13. R.E. Shroder, R.J. Nemanich, and J.T. Glass Phys. Rev., B 41 6 1990 3738
14. W.A. Yarbrough, and R. Messier Science 247 1990 688
15. A.C. Ferrari, and J. Robertson Phys. Rev., B 63 2001 121405(R)
16. R. Pfeiffer, H. Kuzmany, P. Knoll, S. Bokova, N. Salk, and B. Günther Diamond Relat. Mater. 12 2003 268
17. H. Kuzmany, R. Pfeiffer, N. Salk, and B. Günther Carbon 42 2004 911
18. S. Schwarz, S.M. Rosiwal, M. Frank, D. Breidt, and R.F. Singer Diamond Relat. Mater. 11 2002 589
19. J.C. Angus, and E.A. Evans A. Paoletti A. Tucciarone The Physics of Diamond 1997 IOS Press Amsterdam 31
20. E. Zeiler, S. Schwarz, S.M. Rosiwal, and R.F. Singer Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 335 2002 236
21. M. Sommer, and F.W. Smith J. Mater. Res. 5 11 1990 2433
22. R. Kroeger, L. Schaefer, C.P. Klages, and R. Six Phys. Status Solidi, A Appl. Res. 154 1996 33