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Volumn 17, Issue 1, 2006, Pages 163-169
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Carrier density in a thin silicon layer with nanovoids
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER CONCENTRATION;
CONCENTRATION (PROCESS);
CRYSTALLINE MATERIALS;
DOPING (ADDITIVES);
ELECTRON MOBILITY;
NANOSTRUCTURED MATERIALS;
SILICON;
INTERFACE STATE;
NANOVOIDS;
SILICON LAYERS;
SPECIFIC VALUES;
THIN FILMS;
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EID: 29144441428
PISSN: 09574484
EISSN: 13616528
Source Type: Journal
DOI: 10.1088/0957-4484/17/1/026 Document Type: Article |
Times cited : (8)
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References (19)
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