Portable coordinate measuring tool

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3056-3060

  Jiang, Li ^a   Feldman, M ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMMERSION MICROSCOPES; INTEGRATED CIRCUIT FABRICATION; MEASURING TOOLS; WAFERS;

ALUMINUM; DIFFRACTION GRATINGS; DYES; LIGHT ABSORPTION; MEASUREMENT THEORY; POLYMETHYL METHACRYLATES; PORTABLE EQUIPMENT;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 29044450823     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2134718     Document Type: Article

References (8)

1. 2004 Update to International Technology Roadmap for Semiconductors, http://public.itrs.net.
2. L. Jiang and M. Feldman, J. Vac. Sci. Technol. B 22, 3405 (2004).
3. Coumarin dye number 314, Sigma-Aldrich Corporation, 3050 Spruce St., Saint Louis, MO 63103-2530.
4. Holographic Diffraction Grating Film catalog number R40-267, Edmund Industrial Optics, 101 East Gloucester Pike, Barrington, NJ 08007-1380.
5. Microscope model BX60, with 1.30 numerical aperture objective model UPlanFl, Olympus America Inc., 2 Corporate Center Drive, Melville, NY 11747.
6. Interference filter catalog number R46-156, Edmund Industrial Optics, 101 East Gloucester Pike, Barrington, NJ 08007-1380.
7. Torpedo boy laser level, catalog number 41102-3VGA, Harbor Freight Tools, 3491 Mission Oaks Blvd., Camarillo, CA 93011.
8. P. T. Konkola, C. G. Chen, R. K. Heilmann, C. Joo, J. C. Montoya, C.-H. Chang, and M. L. Schattenburg, J. Vac. Sci. Technol. B 21, 3097 (2003).