Electron-electron interaction induced beam displacement in a multiple electron beam system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2589-2595

  Yu, Ming L ^a   Coyle, Steven T ^a,b   Devore, William ^a   Shamoun, Bassam ^a  

^a APPLIED MATERIALS INC   (United States)

^b GATAN INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEMAGNIFICATION; ELECTRON-ELECTRON INTERACTION; MASK PLATES;

COMPUTER SIMULATION; LITHOGRAPHY; MATHEMATICAL MODELS;

ELECTRON BEAMS;

EID: 29044450205     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2101788     Document Type: Article

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