A novel silicon texturization method based on etching through a silicon nitride mask

Progress in Photovoltaics: Research and Applications

Volumn 13, Issue 8, 2005, Pages 691-695

  Weber, K J ^a   Blakers, A W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Light trapping; Siliconl; Texturization

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; PHOTOCONDUCTIVITY; SILICON NITRIDE;

LIGHT TRAPPING; SILICONL; TEXTURIZATION;

SILICON SOLAR CELLS;

EID: 29044448552     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/pip.632     Document Type: Article

References (14)

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