Depth-profiling pore morphology in nanoporous thin films using positronium lifetime annihilation spectroscopy

Materials Research Society Symposium Proceedings

Volumn 863, Issue , 2005, Pages 29-34

  Vallery, Richard S ^a   Peng, Hua Gen ^a   Frieze, William E ^a   Gidley, David W ^a   Moore, Darren L ^b   Carter, Richard J ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS;

NANOPOROUS THIN FILMS; POSITRON ANNIHILATION LIFETIME SPECTROSCOPY (PALS); SUB-MICRON FILMS;

THIN FILMS;

EID: 28844494536     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-863-b1.6     Document Type: Conference Paper

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