TEM analysis of threading dislocations in crack-free AlxGa 1-xN grown on an AlN(0001) template

Physica Status Solidi C: Conferences

Volumn , Issue 7, 2003, Pages 2444-2447

  Kuwano, N ^a   Tsuruda, T ^a   Kida, Y ^b   Miyake, H ^b   Hiramatsu, K ^b   Shibata, T ^b,c  

^a KYUSHU UNIVERSITY   (Japan)

^b MIE UNIVERSITY   (Japan)

^c NGK INSULATORS LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AL CONTENT; CRACK FREE; D. TRANSMISSION ELECTRON MICROSCOPES (TEM); EPITAXIALLY GROWN; HETERO INTERFACES; N LAYERS; TEM ANALYSIS; THREADING DISLOCATION;

ALUMINUM NITRIDE; NITRIDES; SAPPHIRE; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM;

EID: 28844492711     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200303517     Document Type: Conference Paper

References (9)

1. H. Amano, N. Sawaki, I. Akasaki, and Y. Toyoda, Appl. Phys. Lett. 48, 353 (1986).
2. S. Nakamura, Jpn. J. Appl. Phys. 30, L1705 (1991).
3. M. Sakai, H. Ishikawa, T. Egawa, T. Jimbo, M. Umeo, T. Shibata, K. Asai, S. Sumiya, Y. Kuraoka, M. Tanaka, and O. Oda, Inst. Phys. Conf. Ser. No. 170, Chap. 9, 783 (2002).
4. T. Shibata, Y. Kida, H. Miyake, K. Hiramatsu, Y. Hori, K. Asai, T. Nagai, S. Sumiya, M. Tanaka, and O. Oda, Inst. Phys. Conf. Ser. No. 170, Chap. 9, 795 (2002).
5. Y. Kida, T. Shibata, H. Naoi, H. Miyake, K. Hiramatsu, and M. Tanaka, phys. stat. sol. (a) 194, 498 (2002).
6. S. Terao, M. Iwaya, T. Sano, T. Nakamura, S. Kamiyama, H. Amano, and I. Akasaki, J. Cryst. Growth 237-239, 947 (2002).
7. N. Kuwano, T. Tsuruda, Y. Adachi, S. Terao, S. Kamiyama, H. Amano, and I. Akasaki, phys. stat. sol. (a) 192, 367 (2002).
8. K. Hiramatsu, S. Itoh, H. Amano, I. Akasaki, N. Kuwano, T. Shiraishi, and K. Oki, J. Cryst. Growth 115, 628 (1991).
9. I. Yonenaga and S. Suzuki, Philos. Mag. Lett. 82, 535 (2002).