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Volumn 155, Issue 3, 2005, Pages 652-656
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Theoretical study on thin-film formation by parallel molecular dynamics simulation
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Author keywords
Computer simulation; CVD; Epitaxy; Molecular dynamics; Thin film
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Indexed keywords
ADHESION;
CHEMICAL VAPOR DEPOSITION;
COMPUTER SIMULATION;
EPITAXIAL GROWTH;
MOLECULAR DYNAMICS;
CLUSTER SIZE;
VELOCITY RANGE;
THIN FILMS;
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EID: 28844462461
PISSN: 03796779
EISSN: None
Source Type: Journal
DOI: 10.1016/j.synthmet.2005.08.022 Document Type: Conference Paper |
Times cited : (7)
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References (11)
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