EBSD measurements of elastic strain fields in a GaN/sapphire structure

Microelectronics Reliability

Volumn 46, Issue 1, 2006, Pages 178-182

  Luo, J F ^a   Ji, Y ^a   Zhong, T X ^a   Zhang, Y Q ^a   Wang, J Z ^a   Liu, J P ^a   Niu, N H ^a   Han, J ^a   Guo, X ^a   Shen, G D ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; ELECTRON DIFFRACTION; EPITAXIAL GROWTH; GALLIUM NITRIDE; SAPPHIRE; STRAIN;

ELASTIC STRAIN FIELDS; ELECTRON BACKSCATTER DIFFRACTION (EBSD); KIKUCHI BANDS;

THIN FILMS;

EID: 28844448726     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2005.05.012     Document Type: Article

References (11)

1. L. Reimer Scanning electron microscopy 2nd ed. 1998 Springer New York p. 368-74
2. D.J. Dingley, and V. Randle J Mater Sci 27 1992 4545
3. A. Gholinia, F.J. Humphreys, and P.B. Prangnell Production of ultra-fine grain microstructures in AlMg alloys by coventional rolling Acta Mater 50 2002 4461 4476
4. N. Stanford, and D. Dunne Deformation and annealing of (0 1 1)[0 1 -1] oriented Al single crystals Acta Mater 51 2003 665 676
5. A.J. Wilkinson, and P.B. Hirsh Electron diffraction based techniques in scanning electron microscopy of bulk materials Micron 28 4 1997 279 308
6. K.Z. Troost, P. van der Sluis, and D.J. Gravesteijn Microscale elastic-strain determination by backscatter Kikuchi diffraction in the scanning electron microscope Appl Phys Lett 62 10 1993 1110 1112
7. A.J. Wilkinson Measurement of elastic strains and small lattice rotations using electron back scatter diffraction Ultramicroscopy 62 1996 237 247
8. Trager-Cowan C, Manson-Smith SK, Cowan DA, Sweeney F, McColl D, Mohammed A, et al. Characterisation of nitride thin films by electron backettered diffraction. In: Proceedings of E-MRS 2000 meeting. 2000. C-III.3.
9. R.R. Keller, A. Roshko, R.H. Geiss, K.A. Bertness, and T.P. Quinn EBSD measurement of strain in GaAs due to oxidation of buried AlGaAs layers Microelectron Eng 75 2004 96 102
10. William A. Melton, and Jacques I. Pankove GaN growth on sapphire J Cryst Growth 178 1997 168 173
11. Xiaodong Tao. An EBSD study on mapping of small orientation differences in lattice mismatched heterostructures. Dissertation abstracts international, vol. 64-12, Section: B. p. 6284.