Reaction Chain of Process Queue Time Quality Control

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 47-50

  Lee, Yih Yi ^a   Chen, C T ^a   Wu, Chester ^a  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

OPTIMIZATION; QUALITY CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE;

BATCH RUN DISPATCHING; PROCESS QUEUE TIME QUALITY CONTROL; SEMICONDUCTOR TECHNOLOGY GENERATION;

PROCESS CONTROL;

EID: 28744454195     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. M.Y. Tsai. "Integrated Production Planning with Quota of Product Priorities in IC Manufacturing Chains", Master Thesis, National Chi-Nan Univ., June 2003
2. H. Toba. "Segment-based Approach for Real Time Reactive Researching for Automatic Manufacturing Control ", IEEE Trans. Semiconduct Manufact., Aug. 2000,13(3):264-272,
3. J. K. Roberson, J. W. Fowler, and J. F. Bard., "The Use of Upstream and Downstream Information in Semiconductor Batch Operation ", Int. J. Prod. Res., ,1995,33:1849-1869
4. Roberson, J. K., and Giglio, R., "Capacity Planning for semiconductor wafer fabrication with time constraint between operation", Proceedings of the 1999 Winter Simulation Conference, 1999,880-887,
5. Connors D. P., Feigin G. E., and Yao D. D.," A Queuing network model for semiconductor manufacturing", IEEE Transactions on Semiconductor Manufacturing , 1996 ,Vol 9, No 3,
6. Yih-Yi Lee, N.N.Fan," Supply Chain Driven - Advanced Target Delivery System", SMTW Semiconductor Manufacturing Technology Workshop Proceedings, 2004 ,19-20