Diagnostics of hydrogen plasma with in situ optical emission and silicon probes

Journal of Applied Physics

Volumn 98, Issue 10, 2005, Pages

  Lee, Szetsen ^a   Chung, Yi Jie ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA PARAMETERS; PLASMA-INDUCED OPTICAL EMISSION; WETTABILITY;

GAS DISCHARGE TUBES; HYDROGEN; HYDROPHILICITY; OPTICAL PROPERTIES; REACTION KINETICS; SILICON;

PLASMAS;

EID: 28644448336     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2132517     Document Type: Article

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