Phase modulation microscope MIM-2.1 for measurements of surface microrelief. General principles of design and operation

Journal of Russian Laser Research

Volumn 26, Issue 5, 2005, Pages 380-393

  Andreev, V A ^a   Indukaev, K V ^a  

^a AMPHORA Labs Co Ltd   (Russian Federation)

Author keywords

Interferogram; Phase modulation microscopy; Phase relief; Point sources of light; Resolution criterion

Indexed keywords

EID: 28644442585     PISSN: 10712836     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10946-005-0041-1     Document Type: Article

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