Phase modulation microscope MIM-2.1 for measurements of surface microrelief. Results of measurements

Journal of Russian Laser Research

Volumn 26, Issue 5, 2005, Pages 394-401

  Andreev, V A ^a   Indukaev, K V ^a   Ioselev, O K ^a   Legkii, A I ^a   Lazarev, G L ^a   Orlov, D A ^a  

^a AMPHORA Labs Co Ltd   (Russian Federation)

Author keywords

Phase modulation microscopy; Resolution; Surface microrelief

Indexed keywords

EID: 28644438962     PISSN: 10712836     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10946-005-0042-0     Document Type: Article

References (12)

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