Zinc-blende aluminum nitride formation using low-energy ion beam assisted deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 424-426

  Matsumoto, T ^a   Kiuchi, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AlN; Cubic AlN; Ion beam; Ion energy; Low energy; Zinc blende AlN

Indexed keywords

ION BEAM ASSISTED DEPOSITION; MORPHOLOGY; SILICON; THERMAL EFFECTS; X RAY DIFFRACTION; ZINC;

CUBIC ALN; ION ENERGY; LOW-ENERGY; ZINC-BLENDE ALN;

ALUMINUM NITRIDE;

EID: 28544449348     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.048     Document Type: Conference Paper

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