Dot-array implantation for patterned doping of semiconductors

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 257-260

  Wanzenboeck, H D ^a   Ostermaier, C ^a   Gruen, A ^a   Eichinger, B ^a   Karner, M ^a   Bertagnolli, E ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Focused ion beam (FIB); Gallium; Implantation

Indexed keywords

DOPING (ADDITIVES); ELECTRON BEAMS; GALLIUM; ION BEAMS; ION IMPLANTATION; MOSFET DEVICES; SILICON;

DOT-ARRAYS; EFFECTIVE BEAMS; FOCUSED ION BEAM (FIB); IMPLANTATION;

SEMICONDUCTOR MATERIALS;

EID: 28544438073     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.197     Document Type: Conference Paper

References (14)

1. J. Melngailis Proc. SPIE 1465 1991 36
2. T. Hadda, T. Goto, J. Yanagisawa, F. Wakaya, Y. Yuba, and K. Gamo J. Vac. Sci. Technol. B18 6 2000 3158
3. T. Fujisawa, T. Saku, Y. Hirayama, and S. Tarucha Appl. Phys. Lett. 63 1 1993 51
4. C.M. Lin, A.J. Steckl, T.P. Chow, in: Proceedings of MRS Symposium, Laser and Particle Beam Chemical Processing for Microelectronics, Vol. 495, 1988.
5. A.J. Steckl, H. Mogul, and S. Morgren J. Vac. Sci. Technol. B 9 5 1991 2718
6. C. Crell, S. Friedrich, H.U. Schreiber, and A.D. Wieck J. Appl. Phys. 82 9 1997 4616
7. T. Shinida, H. Koyama, C. Honoshita, K. Imammura, and I. Ohdomari Jpn. J. Appl. Phys. Lett. 41 2 3A 2002 L287
8. T. Hussain, J.R. Cleaver, and H. Ahmed Jap. J. Appl. Phys. 33 4A 1994 2087
9. A. Ahmed, S. Noor-Mohamada, and R.I. Carter Appl. Phys. 78 12 1995 7007
10. J.E. Murguia, M.I. Shepard, J. Melngailis, A.L. Lattes, and S.C. Munroe J. Vac. Sci. Technol. B 9 5 1991 2714
11. U. Litmark, and J.F. Ziegler Phys. Rev. A 23 1981 64
12. A. Lugstein, B. Basnar, J. Smoliner, and E. Bertagnolli Appl. Phys. A 76 4 2003 545
13. H.C. Mogul, and A.J. Steckl IEEE Trans. Electron. Dev. 40 10 1993 1823
14. R. Pierret Semiconductor Fundamentals Modular Series on Solid State Devices Vol. 2 1988 Addison-Wesley