Controlled growth of silicon nanowires

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5838, Issue , 2005, Pages 285-292

  Wong, Y Y ^a   Yahaya, M ^a   Salleh, M Mat ^a   Majlis, B Yeop ^a  

^a INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

Author keywords

Au Si phase diagram; Gold catalyst; N2 ambient; Silicon nanowires; Solid liquid solid; Thermal anneal

Indexed keywords

ANNEALING; GOLD; GROWTH (MATERIALS); PHASE DIAGRAMS; SILICON; SILICON ALLOYS; SUBSTRATES;

AU-SI PHASE DIAGRAM; GOLD CATALYST; N2 AMBIENT; SILICON NANOWIRES; SOLID-LIQUID-SOLID; THERMAL ANNEAL;

NANOSTRUCTURED MATERIALS;

EID: 28344443481     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.608449     Document Type: Conference Paper

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