Pattern preserving deposition: Experimental results and modeling

Applied Physics Letters

Volumn 87, Issue 12, 2005, Pages 1-3

  Castez, Marcos F ^a   Fonticelli, Mariano H ^a   Azzaroni, Omar ^a   Salvarezza, Roberto C ^a   Solari, Hernán G ^b  

^a Facultad de Ciencias Naturales e Instituto M Lillo   (Argentina)

^b UNIVERSIDAD DE BUENOS AIRES   (Argentina)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ASPECT RATIO; COPPER; METALS; SUBSTRATES; SURFACE CHEMISTRY; VAPORS;

METAL DEPOSITION; PATTERN PRESERVING DEPOSITION; SURFACE DIFFUSION;

DEPOSITION;

EID: 28344438077     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2053368     Document Type: Article

References (14)

1. C. M. Sotomayor Torres, Alternative Lithography: Unleashing the Potentials of Nanotechnology (Plenum, New York, 2004).
2. C.-S. Son, T. G. Kim, X.-L. Wang, and M. Ogura, J. Cryst. Growth 221, 201 (2000).
3. N. Tsurumachi, C.-S. Son, T. G. Kim, and M. Ogura, J. Cryst. Growth 237, 1486 (2002).
4. A. K. Chattopadhyay, Phys. Rev. B 65, 041405 (2002).
5. J. T. Drotar, Y.-P. Zhao, T.-M. Lu, and G.-C. Wang, Phys. Rev. B 64, 125411 (2001).
6. D. E. Wolf and J. Villain, Europhys. Lett. 13, 389 (1990).
7. R. P. Karunasiri, R. Bruinsma, and J. Rudnick, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.62.788 62, 788 (1989); G. S. Bales and A. Zangwill, Phys. Rev. Lett. 63, 692 (1989).
8. R. P. Karunasiri, R. Bruinsma, and J. Rudnick, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.62.788 62, 788 (1989); G. S. Bales and A. Zangwill, Phys. Rev. Lett. 63, 692 (1989).
9. A. L. Barabasi and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995); J. Lapujoulade, Surf. Sci. Rep. 20, 191 (1994).
10. A. L. Barabasi and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995); J. Lapujoulade, Surf. Sci. Rep. 20, 191 (1994).
11. S. N. Ethier and T. G. Kurtz, Markov Processes (Wiley, New York, 1986); J. P. Aparicio and H. G. Solari, Phys. Rev. Lett. 86, 4183 (2001).
12. S. N. Ethier and T. G. Kurtz, Markov Processes (Wiley, New York, 1986); J. P. Aparicio and H. G. Solari, Phys. Rev. Lett. 86, 4183 (2001).
13. G. Andreasen, P. L. Schilardi, O. Azzaroni, and R. C. Salvarezza, Langmuir 18, 10430 (2002).
14. M. F. Castez (unpublished).