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Volumn 44, Issue 28, 2005, Pages 5905-5909

Automated small tilt-angle measurement using Lau interferometry

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; IMAGE RECONSTRUCTION; INTERFEROMETRY; LIGHT;

EID: 28044466890     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.005905     Document Type: Article
Times cited : (30)

References (18)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.