Development of a secondary-electron ion-microscope for microbeam diagnostics

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 60-64

  Garty, G ^a   Randers Pehrson, G ^a   Brenner, D J ^a  

^a Department of Medicine   (United States)

Author keywords

Emission microscopy; Ion beam analysis; Microbeam diagnostics; Spatial resolution

Indexed keywords

ELECTRON TRANSITIONS; IMAGING TECHNIQUES; LENSES; OPTICAL RESOLVING POWER; PARTICLE BEAMS; PLASMA DIAGNOSTICS;

EMISSION MICROSCOPY; ION BEAM ANALYSIS; MICROBEAM DIAGNOSTICS; SPATIAL RESOLUTION;

ELECTRON MICROSCOPES;

EID: 28044446585     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.035     Document Type: Conference Paper

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