Optical simulation of a MOEMS based tuneable Fabry-Perot interferometer

Proceedings of IEEE Sensors

Volumn 3, Issue , 2004, Pages 1324-1327

  Rubio, R ^a   Sabate, N ^b   Calaza, C ^a   Santander, J ^a   Fonseca, L ^a   Gracia I ^a   Cane C ^a   Moreno, M ^b   Marco, S ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Fabry Perot; Gas detection; Interferometer; MOEMS; NDIR; Optical simulation; Tuneable filter

Indexed keywords

CAVITY RESONATORS; DIELECTRIC DEVICES; FABRY-PEROT INTERFEROMETERS; MIRRORS; OPTICAL FILTERS; SILICON;

FABRY PEROT; GAS DETECTION; MOEMS; NDIR; OPTICAL SIMULATION; TUNEABLE FILTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 27944476009     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. F. Abelès, "Advanced Optical Techniques", North Holland, Amsterdam, 1967
2. C. Calaza, M. Moreno, S. Marco, L. Fonseca, C. Cané, I. Gràcia, "Assessment of the final metrological characteristics of a MOEMS based NDIR spectrometer through system modelling and data processing," IEEE Sensors Journal 3 (5): 587-594 Oct. 2003.
3. C. Calaza, S. Marco, M. Moreno, L. Fonseca, C. Cané, I. Gràcia, "Modelling and simulation of an electrostatically actuated surface-micromachined tuneable Fabry-Perot interferometer". Proceedings EuroSimE2001, Paris, France. 9-11 April 2001. pp. 241-247.
4. C. Calaza, L. Fonseca, M. Moreno, S. Marco, C. Cané, I. Gràcia, "A surface micromachining process for the development of a medium-infrared tuneable Fabry-Perot interferometer". Sensors and actuators a-physical 113 (1): 39-47 June 15 2004