Immersion holographic recording of subwavelength gratings in amorphous chalcogenide thin films

Journal of Optoelectronics and Advanced Materials

Volumn 7, Issue 5, 2005, Pages 2581-2586

  Teteris, J ^a   Reinfelde, M ^a  

^a UNIVERSITY OF LATVIA   (Latvia)

Author keywords

Amorphous As S Se and As2S3 films; Holography; Lithography

Indexed keywords

AMORPHOUS FILMS; CHALCOGENIDES; HOLOGRAPHY; LITHOGRAPHY; REFRACTIVE INDEX; SELENIUM COMPOUNDS; SEMICONDUCTING SELENIUM COMPOUNDS; THIN FILMS;

AMORPHOUS CHALCOGENIDE; AMORPHOUS CHALCOGENIDE FILMS; ANGULAR SELECTIVITY; CHALCOGENIDE SEMICONDUCTORS; GRATING PERIODS; HOLOGRAPHIC RECORDINGS; SOLID IMMERSION HOLOGRAPHIC METHOD; SUB-WAVE LENGTH GRATING;

SULFUR COMPOUNDS;

EID: 27944473667     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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