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Volumn 6, Issue 3, 2004, Pages
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Subwavelength-period gratings in amorphous chalcogenide thin films
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Author keywords
Amorphous As S Se and As2S3 films; Holography; Lithography
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Indexed keywords
AMORPHOUS AS-S-SE AND AS2S3 FILMS;
CHALCOGENIDES;
AMORPHOUS FILMS;
ATOMIC FORCE MICROSCOPY;
COMPOSITION;
ETCHING;
HOLOGRAPHY;
LIGHT MODULATION;
LIGHT POLARIZATION;
LITHOGRAPHY;
REFRACTIVE INDEX;
SURFACE PHENOMENA;
THERMAL EFFECTS;
THIN FILMS;
DIFFRACTION GRATINGS;
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EID: 1842483909
PISSN: 14644258
EISSN: None
Source Type: Journal
DOI: 10.1088/1464-4258/6/3/024 Document Type: Conference Paper |
Times cited : (12)
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References (17)
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