Tin oxide humidity sensors operating at room temperature obtained by co-evaporation of TeO2 and Sn

Journal of Optoelectronics and Advanced Materials

Volumn 7, Issue 5, 2005, Pages 2595-2600

  Georgieva, B ^a   Podolesheva, I ^a   Pirov, J ^a   Platikanova, V ^a  

^a CENTRAL LABORATORY OF PHOTOPROCESSES   (Bulgaria)

Author keywords

Humidity sensors; Thin layers; Tin oxide

Indexed keywords

DEPOSITION; EVAPORATION; HUMIDITY SENSORS; IV-VI SEMICONDUCTORS; TESTING; TIN OXIDES;

ACCELERATED AGEING TESTS; CHEMICAL COMPOSITIONS; EVAPORATION CONDITIONS; HUMIDITY SENSING PROPERTY; LONG TERM STABILITY; NANO-SIZED PARTICLES; THERMAL PRE-TREATMENT; THIN LAYERS;

TELLURIUM COMPOUNDS;

EID: 27844554802     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

1. R. Lalauze, C. Pijolat, G. Tournier, P. Breuil, Electron Technol. 33(1-2), 31 (2000).
2. I. Podolesheva, V. Dimov, M. Tarassov, V. Platikanova, I. Konstantinov, J. Vac. Sci. Technol. A 16(4), 2608 (1998).
3. G. Danev, E. Spassova, J. Assa, I. Karamancheva, A. Paskaleva, K. Popova, J. Ihleman, Vacuum 70, 37 (2003).
4. I. Podolesheva, P. Gushterova, V. Platikanova, I. Konstantinov, J. Vac. Sci. Technol. A 16(2), 674 (1998).
5. C. A. Goss, D. H. Charych, M. Majda, Anal. Chem. 63, 85 (1991).
6. B. Mednikarov, M. Sahatchieva, J. Optoelectron. Adv. Mater. 7(3), 1415 (2005).
7. E. Kuzmann, K. Nomura, I. Podolesheva, P. Gushterova, Z. Homonnay, A. Vertes, Hyperfine Interactions 139(1), 257 (2002).
8. M. Josowicz, J. Janata, M. Levy, J. Electrochem. Soc. 135, 115 (1988).
9. R. M. Cohen, J. Janata, J. Electroanal. Chem. Interfacial Electrochem. 151, 33 (1983).