Effect of deposition temperature on surface acoustic wave velocity of aluminum nitride films determined by Brillouin spectroscopy

Journal of Applied Physics

Volumn 98, Issue 9, 2005, Pages

  Assouar, M B ^a   Riobóo, R J Jiménez ^b   Vila, M ^b   Alnot, P ^a  

^a INSTITUT JEAN LAMOUR   (France)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AIN FILMS; DEPOSITION TEMPERATURE; GROWTH VELOCITY; SURFACE ACOUSTIC WAVES;

ACOUSTIC SURFACE WAVE DEVICES; BRILLOUIN SCATTERING; OPTICAL FILMS; STATISTICAL METHODS; TEMPERATURE DISTRIBUTION;

SPECTROSCOPIC ANALYSIS;

EID: 27844522876     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2121927     Document Type: Article

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