Optical track width measurements below 100 nm using artificial neural networks

Measurement Science and Technology

Volumn 16, Issue 12, 2005, Pages 2397-2404

  Smith, R J ^a   See, C W ^a   Somekh, M G ^a   Yacoot, A ^b   Choi, E ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Artificial neural networks; Common path scanning interferometer; Optical track width measurements

Indexed keywords

INTERFEROMETERS; OPTICAL INSTRUMENT LENSES; OPTICAL MICROSCOPY; SCANNING;

COMMON PATH SCANNING INTERFEROMETERS; OPTICAL TRACK-WIDTH MEASUREMENTS;

NEURAL NETWORKS;

MEASUREMENT METHOD;

EID: 27844497926     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/16/12/001     Document Type: Article

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