Thermally Excited Silicon Microactuators

IEEE Transactions on Electron Devices

Volumn 35, Issue 6, 1988, Pages 758-763

  Riethmoller, Werner ^a   Benecke, Wolfgang ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS - FABRICATION;

MICROMACHINING; SILICON MICROACTUATORS; THERMAL EXCITATION;

ACTUATORS;

EID: 0024029518     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.2528     Document Type: Article

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