"Anomalous" speed dependence in polyimide spin coating

Journal of the Electrochemical Society

Volumn 144, Issue 11, 1997, Pages 3959-3963

  Sukanek, Peter C ^a,b  

^a The University of Mississippi   (United States)

^b ELECTROCHEMICAL SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; MATHEMATICAL MODELS; PHOTOCHEMICAL REACTIONS; POLYIMIDES; SPEED;

PHOTORESIST SOLUTION; POLYIMIDE SPIN COATING; SPEED DEPENDENCE;

COATING TECHNIQUES;

EID: 0031272875     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838118     Document Type: Article

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