Femtosecond laser pulses for surface-profile metrology

Optics Letters

Volumn 30, Issue 19, 2005, Pages 2650-2652

  Oh, Jeong Seok ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FEMTOSECOND LASER PULSES; INTERFEROMETRIC LIGHT SOURCES; SURFACE-PROFILE METROLOGY; UNEQUAL-PATH SCANNING INTERFEROMETRY;

COHERENT LIGHT; INTERFEROMETRY; LASER THEORY; LIGHT SOURCES; MEASUREMENT THEORY; OPTICAL ENGINEERING; PROFILOMETRY; SCANNING;

LASER PULSES;

EID: 27744599683     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.30.002650     Document Type: Review

References (8)

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