Characterization of ITO thin films on PET substrates prepared by gas-timing RF magnetron sputtering

e-Journal of Surface Science and Nanotechnology

Volumn 3, Issue , 2005, Pages

  Klamchuen, Annop ^a   Pornteeraphat, Nisaporn ^a   Nukeaw, Jiti ^a  

^a KING MONGKUT'S INSTITUTE OF TECHNOLOGY LADKRABANG   (Thailand)

Author keywords

Gas timing; Indium tin oxide; Polyethylene terephthalate (PET); RF magnetron sputtering

Indexed keywords

CRYSTALLINE MATERIALS; NANOSTRUCTURED MATERIALS; POLYETHYLENE TEREPHTHALATES; SEMICONDUCTING INDIUM COMPOUNDS; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

GAS-TIMIMG; INDIUM TIN OXIDE (ITO); RF MAGNETRON SPUTTERING; ROOM TEMPERATURE;

THIN FILMS;

EID: 27744593750     PISSN: 13480391     EISSN: 13480391     Source Type: Journal    
DOI: 10.1380/ejssnt.2005.272     Document Type: Conference Paper

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