Characterization of charging in semiconductor device materials by electron holography

Journal of Electron Microscopy

Volumn 54, Issue 3, 2005, Pages 239-242

  McCartney, Martha R ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Breakdown voltage; Charging; Electron holography; Electrostatic potential; Semiconductor device

Indexed keywords

EID: 27744505942     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/54.3.239     Document Type: Article

References (6)

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