Fabrication and microstructures of Si composite nanocone arrays

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 13, 2005, Pages 2479-2483

  Meng, X M ^a,b   Shang, N G ^a   Lee, C S ^a   Bello, I ^a   Lee, S T ^a,b  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ION SPUTTERING; NANOCONE ARRAYS; SILICON SUBSTRATES;

ARRAYS; CHARACTERIZATION; CRYSTAL ORIENTATION; ELECTRON ENERGY LOSS SPECTROSCOPY; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

SEMICONDUCTING SILICON;

EID: 27744502855     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200420086     Document Type: Article

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