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Volumn 90, Issue 1, 2006, Pages 111-119
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Induced structural damages by He+ irradiation in conducting transparent indium-tin oxide thin films
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Author keywords
Indium tin oxide; Ion beam implantation; Structural damages; Thin films; Transparent conducting materials
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Indexed keywords
CRYSTALLOGRAPHY;
ELECTRONIC STRUCTURE;
HELIUM;
INDIUM COMPOUNDS;
ION BEAMS;
ION IMPLANTATION;
MORPHOLOGY;
POLYCRYSTALLINE MATERIALS;
POSITIVE IONS;
INDIUM TIN OXIDE;
ION BEAM IMPLANTATION;
STRUCTURAL DAMAGES;
TRANSPARENT CONDUCTING MATERIALS;
THIN FILMS;
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EID: 27644535372
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2004.09.023 Document Type: Article |
Times cited : (20)
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References (11)
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