Ion tracks developed in polyimide resist on Si wafers as template for nanowires

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 240, Issue 3, 2005, Pages 681-689

  Skupinski, Marek ^a   Toulemonde, Marcel ^b   Lindeberg, Mikael ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b Centre Interdisciplinaire de Recherche Ions Lasers   (France)

Author keywords

Electroplating; Ion track; Nanowires; Polyimide

Indexed keywords

ELECTROPLATING; ION SOURCES; MAGNETORESISTANCE; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SENSORS; SILICON WAFERS; SODIUM COMPOUNDS; VELOCITY MEASUREMENT;

ETCH PROPERTIES; ETCH RATES; ION TRACK TECHNOLOGY; NANOWIRES;

POLYIMIDES;

EID: 27644476329     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.04.128     Document Type: Article

References (34)

1. B.E. Fischer, and R. Spohr Rev. Modern Phys. 55 1983 907
2. R. Spohr Ion Tracks and Microtechnology 1990 Vieweg Verlag
3. M. Toulemonde, C. Dufour, and E. Paumier Phys. Rev. B 46 1992 14362
4. A. Meftah, F. Brisard, J.M. Costantini, E. Dooryhee, M. Hage-Ali, M. Hervieu, J.P. Stoquert, F. Studer, and M. Toulemonde Phys. Rev. B 49 1994 12457
5. Z.G. Wang, C. Dufour, E. Paumier, and M. Toulemonde J. Phys.: Condens. Matter 6 1994 6733
6. M. Toulemonde, C. Dufour, A. Meftah, and E. Paumier Nucl. Instr. and Meth. B 166-167 2000 903
7. P. Apel, A. Schulz, R. Spohr, C. Trautmann, and V. Vutsadakis Nucl. Instr. and Meth. B 146 1998 468
8. P. Apel Radiat. Measur. 34 2001 559
9. P. Apel, A. Schulz, R. Spohr, C. Trautmann, and V. Vutsadakis Nucl. Instr. and Meth. B 131 1997 55
10. R.L. Fleischer, P.B. Price, and R.M. Walker Nuclear Tracks in Solids, Principles and Applications 1975 University of California, Press London, England
11. P. Apel Contribution to IAEA Consultants' Meeting 1999 JAERI Takasaki
12. A. Fert, and L. Piraux J. Magn. Magn. Mater. 200 1999 338
13. A. Blondel, J.P. Meier, B. Doudin, and J.-P. Ansermet Appl. Phys. Lett. 65 1994 3019
14. L. Piraux, J.M. George, J.F. Despres, C. Leroy, E. Ferain, R. Legras, K. Ounadjela, and A. Fert Appl. Phys. Lett. 65 1994 2484
15. M. Chen, P.C. Searson, and C.L. Chien J. Appl. Phys. 93 2003 8253
16. F. Elhoussine, S. Matefi-Tempfli, A. Encinas, and L. Piraux Appl. Phys. Lett. 81 2002 1681
17. G. Thornell, K. Hjort, B. Studer, IEEE Trans. Ultrason. Ferroelect. Freq. Control, 1997.
18. C. Milanez Silva, P. Varisco, A. Moehlecke, P.P. Fichtner, R.M. Papalèo, and J. Eriksson Nucl. Instr. and Meth. B 206 2003 486
19. R.G. Musket, J.M. Yoshiyama, R.J. Contolini, and J.D. Porter J. Appl. Phys. 91 2002 5760
20. M.J. Rutter Microelectron. Manufact. Testing 13 1990 29
21. W.E. Marsh, K. Kanakarajan, and G.D. Osborn Mater. Res. Soc. Symp. Proc. 304 1993 91
22. Y. Maekava, Y. Suzuki, M. Yoshida, K. Maeyama, and N. Yonezawa Polymer 44 2003 2307
23. M. Toulemonde, C. Trautmann, E. Balanzat, K. Hjort, and A. Weidinger Nucl. Instr. and Meth. B 216 2004 1
24. L. Klintberg, M. Lindeberg, and G. Thornell Nucl. Instr. and Meth. B 184 2001 536
25. R. Spohr, personal communication.
26. Z. Siwy, D. Dobrev, R. Neumann, C. Trautmann, and K. Voss Appl. Phys. A 76 2003 781
27. P.Y. Apel, I.V. Blonskaya, V.R. Oganessian, O.L. Orelovitch, and C. Trautmann Nucl. Instr. and Meth. B 185 2001 216
28. T. Steckenreiter, E. Balanzat, A. Laurent, E. Paumier, J. Pierrière, J.P. Stoquert, and M. Toulemonde Nucl. Instr. and Meth. B 151 1999 140
29. M.D. Hou, S. Klaumünzer, and G. Schumacher Phys. Rev. B 41 1990 1144
30. T.v. Dillen, E. Snoeks, W. Fukarek, C.M.v. Kats, K.P. Valikov, A. Blaaderen, and A. Polman Nucl. Instr. and Meth. B 175-177 2001 350
31. F. Pawlak, C. Dufour, E. Laurent, E. Paumier, J. Perrière, J.P. Stoquert, and M. Toulemonde Nucl. Instr. and Meth. B 151 1999 140
32. M. Toulemonde, C. Dufour, E. Paumier, and F. Pawlak Res. Soc. Proc. 504 1998 99
33. A. Adla, V. Buschmann, H. Fuess, and C. Trautmann Nucl. Instr. and Meth. B 185 2001 210
34. T. Steckenreiter, Ph.D. Thesis, University of Darmstadt, 1997.