Comparison of contactless measurement and testing techniques to a new all-silicon optical test and characterization method

IEEE Transactions on Instrumentation and Measurement

Volumn 54, Issue 5, 2005, Pages 2082-2089

  Sayil, Selahattin ^a   Kerns Jr , David V ^b   Kerns, Sherra E ^b  

^a Lamar University   (United States)

^b FRANKLIN W OLIN COLLEGE OF ENGINEERING   (United States)

Author keywords

All silicon testing; Contactless measurement and testing; Integrated circuit testing; Optical testing

Indexed keywords

COST EFFECTIVENESS; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; PHOTOEMISSIVE DEVICES; PROBES;

ALL SILICON TESTING; CONTACTLESS MEASUREMENT AND TESTING;

INTEGRATED CIRCUIT TESTING;

EID: 27644455526     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2005.854253     Document Type: Review

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