The first sub-deg/hr bias stability, silicon-microfabricated gyroscope

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 180-183

  Choi, Byoung Doo ^a   Park, Sangjun ^a   Ko, Hyoungho ^a   Paik, Seung Joon ^a   Park, Yonghwa ^a   Lim, Geunwon ^a   Lee, Ahra ^b   Lee, Sang Chul ^b   Carr, William ^c   Setiadi, Dadi ^c   Mozulay, Robert ^c   Cho, Dong Il ^a,b  

^a Seoul National University   (South Korea)

^b SML Electronics Inc   (South Korea)

^c Nano Inertial Systems Inc   (United States)

Author keywords

Bias stability; Gyroscope; SBM process

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON; SINGLE CRYSTALS;

BIAS STABILITY; QUADRATURE ERRORS; SACRIFICIALBULK MICROMACHINING (SBM);

GYROSCOPES;

EID: 27544502574     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. H. Kawai, K. Atsuchi, M. Tamura, and K. Ohwada, "High-resolution Gyroscope using Vibratory Motion Adjustment Technology," Sens. Actuator A, 90, 153-159 (2001).
2. B. Y. Yeh, and Y. C. Liang, "Modelling and Compensation of Quadrature Error for Silicon MEMS Microgyroscope," Power Electronics and Drive Systems, 2, 871-876 (2001)
3. W. Clark, "Micro Machined Vibratory Rate Gyroscope," PhD dissertation.
4. S. Lee, S. Park, J. Kim, S. Yi, and D. Cho, "Surface/Bulk micromachined single-crystalline silicon micro-gyroscope," J. Microelectromech. Syst., 9, 557-567 (2000).
5. J. Kim, S. Park, D. Kwak, H. Ko, W. Carr, J. Buss, and D. Cho, "Robust SOI Process without Footing and Its Application to Ultra High-Performance Microgyroscopes," Sens. Actuator A, 114, 236-243 (2004)