Packaging barrier films deposited on PET by PECVD using a new high density plasma source

Materials Science and Engineering: B

Volumn 119, Issue 3, 2005, Pages 268-273

  Madocks, John ^a   Rewhinkle, Jennifer ^a   Barton, Loren ^a  

^a Applied Process Technologies Inc ^*  (United States)

Author keywords

Barrier film; High density plasma; PECVD; Roll to roll; SiOx coatings

Indexed keywords

COATINGS; ELECTRODES; MAGNETIC FIELDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES;

BARRIER FILMS; HIGH DENSITY PLASMAS; ROLL TO ROLL;

DEPOSITION;

EID: 27544496218     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2004.12.080     Document Type: Conference Paper

References (7)

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