Transparent barrier coatings on PET by single- and dual-frequency PECVD

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1998, Pages 115-120

  da Silva Sobrinho, A S ^a   Latreche, M ^a   Czeremuszkin, G ^a   Klemberg Sapieha, J E ^a   Wertheimer, M R ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ELLIPSOMETRY; MECHANICAL PERMEABILITY; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES; REACTIVE ION ETCHING; SILICA; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; TRANSPARENCY; X RAY PHOTOELECTRON SPECTROSCOPY;

X RAY FLUORESCENCE SPECTROSCOPY;

PROTECTIVE COATINGS;

EID: 0031623724     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)